Piezoelectric cantilever microphone and microspeaker

A micromachined piezoelectric cantilever transducer, which works both as a microphone and as a microspeaker, has been fabricated and tested. The 2000/spl times/2000/spl times/4.5 /spl mu/m/sup 3/ cantilever has a zinc oxide (ZnO) piezoelectric thin film on a supporting layer of low-pressure chemical-vapor-deposited (LPCVD) low-stress silicon nitride. A highlight of the fabrication process, which may also be relevant for other micromachined structures, is the technique for producing a flat, multilayer cantilever. The measured microphone sensitivity is fairly constant at 3 mV//spl mu/bar in the low frequency range and rises to 20 mV//spl mu/bar at the lowest resonant frequency of 890 Hz. The 3 mV//spl mu/bar sensitivity is the highest reported to date for a microphone with a micromachined diaphragm. When measured into a 2 cm/sup 3/ coupler with 4 V(zero-peak) drive, the microspeaker output sound pressure level (SPL) is 75 dB at 890 Hz. It increases to approximately 100 dB SPL at 4.8 kHz with 6 V(zero-peak) drive. The measured microphone frequency response agrees well with the results of an ABAQUS simulation.