Multi-row linear cMUT array using cMUTs and multiplexing electronics

A large area reconfigurable imaging array for research purposes is being developed with co-integrated cMUTs and control electronics. The goal is a 2.5cm 2D tileable module with >16,000 transducer sub-elements spaced at a pitch of 185um in X and Y dimensions. As a prototype demonstration of some of the goals of this effort, a multi-row linear array using cMUTs and external multiplexing electronics was designed and fabricated. In this paper the challenges of trenched cMUT attach to a laminate interposer as part of a tileable module will be discussed. The architecture of the tileable module build-up for manufacturability, reliability, acoustic planarity, and reduced spacing between tiles and cMUT chips will also be addressed. Finally, a first prototype will be shown and experimental acoustic results with the new cMUT-based probe will be presented.