Ultrasonic liear motor using traveling surface acoustic wave

A traveling wave type ultrasonic linear motor has been miniaturized successfully by using a surface acoustic wave (SAW) device. Experimental results of the SAW motor using traveling Rayleigh wave showed high performance in speed of 1.5 m/s, thrust of 13 N and mechanical power of 2 W with a 60×14×1 mm
³
lithium niobate stator and a 4×4 mm
²
silicon slider. Theoretical approach for SAW motor from physical modeling and behavior modeling were introduced. From the simulation, it was found that the frictional drive efficiency would reach up to 80%. An equivalent block diagram of the SAW motor was derived.