On-chip power noise measurements of high-frequency CMOS digital circuits

On-chip power and substrate noise measurements were performed on shift registers in a 90-nm CMOS technology, with operating frequencies ranging from 100 MHz up to 1.2 GHz. Combined on-chip digitization and off-chip timing generation achieves the effective measurement bandwidth as high as 1.3 GHz. It was experimentally observed that dynamic components of power noise decrease for the higher operating frequencies.