Positioning of large-scale high-precision viscoelastic stage based on vibration suppression PTC

A large-scale high-precision viscoelastic stage has resonance modes in low frequency. The resonance modes are an obstruction of fast and precise positioning. In this paper, we apply vibration suppression PTC (Perfect Tracking Control) to a vertical drive of the stage. Finally, the advantages of the vibration suppression PTC (VSPTC) comparing with original PTC are verified in simulations and experiments.