Preparation and piezoresistive characteristics of polycrystalline SnO/sub 2/ films

Tin oxide thin films were deposited by dc magnetron sputtering in a gas mixture of Ar and O/sub 2/. The films were characterized by X-ray diffraction and SEM observation, and showed preferred orientation in [110] or [211] planes. The properties of films depended on the substrate temperature and gas flow ratio of Ar/O/sub 2/. The piezoresistive properties of these films have been measured by a conventional cantilever method. The gauge factor was 5-18 at room temperature.