Polysilicon electrostatic comb MEMS actuator design and analysis

The comb driver was designed and optimized to meet the requirement of enough displacement under lower drive voltage. Device displacement could reach 11um under 30V drive voltage. For comb drive is an inherently unstable system stability analysis about electrostatic spring softing ensure its system stiffness. The inclined comb finger is one main factor to cause its failure. The critical displacement of the comb finger was analyzed.