Regression Model for LPE Film Property Control

Empirical regression equations permit the calculation of liquid phase epitaxial (LPE) film properties from film growth parameters. Numerical differentiation of these equations facilitates examination of the sensitivities of film properties to fluctuations in growth conditions and the development of depletion-compensating growth strategies. Regression equations for nominal 3-µm bubble size CaGe and Ga films have been generated and used for quantitative comparisons of the growth behavior of the two systems. A real time feedback control scheme has been applied to the Ga system resulting in 70 percent of the as-grown films falling within ±1 percent of the target collapse field.