Design and implementation of a high-voltage high-frequency pulse power generation system for plasma applications

This paper presents a high-voltage high-frequency inverter for atmosphere plasma applications. The proposed system is consisted of a PFC rectifier, a voltage-source full-bridge inverter with phase-shift control, a high-voltage high-frequency transformer, and a plasma reactor. The mathematical models including the inverter and the plasma reactor have been described. The PFC rectifier is achieved by UC3854 based controller, and UC 3895 plus PIC16F877 microcontroller are applying to the inverter. Experimental results show the features of the PWM and PDM control strategies in accordance with the applications.