A 1.6 GHz NEMS actuator built from carbon nanotube layer by layer composite films

In summary, this paper demonstrates fixed-beam switches using well-aligned composite SWNT membranes can be switched at low voltage and high frequency. The measured DC pull-in voltages ranged from 0.9V to 4.8 V depending on the length of the switch. AC measurements indicate a switching delay as low as 600 psec for 300 nm beams. This new SWNT composite membrane switch is promising for a variety of applications to high-end nanoelectronics and high-performance MEMS/NEMS. This work was supported by DARPA under SPA WAR grant number N66001-07-1-2060.