Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes

We have developed an ultra-micro displacement sensor (Size:1.3mm×1.3mm×1.3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.