Modeling and simulation for dual stage system using bond graph theory

The dual stage manipulator is composed of the voice coil motor (VCM) and piezoelectric ceramics transducer (PZT), which can produce the high precise displacement and express a well dynamic performance. However, inaccurate modeling of the dual stage exacerbates the positioning accuracy. This paper presents an approach to model the dual stage system using bond graph theory, and then derives the state space equations through the bond graph straightforwardly, which can be used in compute simulations.