2-axis MEMS deflecting cantilever microinstrument for in-situ reliability studies

Growing interest in assessing the reliability of microelectromechanical systems has created a need for the development of microinstruments to interrogate MEMS behavior under diverse conditions. This paper describes the design and testing of a microinstrument for in-situ reliability studies of contacting surfaces in MEMS. Time-dependent changes in the structure, chemistry and electrical properties of polycrystalline silicon (poly-silicon) impacting surfaces are observed, and possible wear mechanisms are proposed.