Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators

Aluminum nitride (AlN) contour mode resonators have been of interest because of their high quality factor, low impedance, large number of frequencies on a single chip and compatibility with CMOS processes. While AlN low insertion loss filters and oscillators have been demonstrated, CMOS integration has yet to be accomplished. This work represents the first time fully-released contour mode AlN microresonators have been integrated with CMOS circuitry to obtain completely monolithic frequency references.