A novel microfluidic sensor system fabricated by SU-8 femtosecond pulsed laser prototyping

In this paper we present the design, simulation and measurement results of a novel sensor system fabricated by femtosecond pulsed laser prototyping. To our knowledge this is the first time an entire optical microfluidic chip with sample flow control is manufactured in SU-8 by ultra short pulsed laser ablation. Almost free of any heat load to the material, it allows resist structuring with high resolution and good edge definition. The fluid dynamic analysis carried out in this work provides the design and measurement parameters for an integrated optical analysis system for particle detection. An enhancement of previously presented systems is obtained by a different side port design which improves the quality of the sample flow shape. Our design also allows measuring fluorescence and optical absorption via fiber coupled laser source and photo detectors.