Versatile MEMS and mems integration technology platforms for cost effective MEMS development

For fast and cost effective development of novel MEMS devices, it is advantageous to start from advanced and stable MEMS technology platforms. IMEC offers such platforms for post-CMOS MEMS integration, RF-MEMS, MEMS interconnection and packaging and for Si-photonics. In this paper these versatile MEMS technology platforms together with various examples are described. In IMEC's CMORE offering, not only technology development but also prototyping and small volume production becomes possible.