A coplanar waveguide probe with applications to thin film dielectric measurements

A novel approach to thin film dielectric measurements at microwave and millimeter wave frequencies is investigated using a coplanar waveguide (CPW) probe. Using the spectral-domain technique, an admittance model describing the CPW thin film interface system is determined for reflection measurement techniques, and delay measurement analysis is performed for thru measurement techniques. To validate the model, an error analysis is performed with 3D electromagnetic simulators and CPW S-parameter data from materials with known dielectric properties.