Low cost production by simplified processing

High throughput and low cost production with 100% yield is strictly demanded for ULSI manufacturing, where a decrease of minimum feature size of devices and an increase of wafer diameter is continuously enhanced for the future. It is realized by simplified processing due to a simplified device structure by introducing new concepts of devices and new materials to Si technology. Simplification of manufacturing processes becomes possible based on a full understanding of process mechanisms in a scientific manner, resulting in a dramatic reduction of process steps.