Ultra flexible R&D line management for Si wafer processes

The ultra flexible lot-low management method was developed for Si wafer R&D lines. The system used comprises a scheduler and a flexible human machine interface. The scheduler is responsible for the many lots with fixed "Standard" process flows, while the "Advanced" lots with non-fixed flows are scheduled manually using the interface. This approach enhances both flexibility and efficiency of lot-flow scheduling in an R&D line consisting of the minimum amount of equipment.