Design and fabrication of HOE for clock distribution in integrated circuits

The authors present the design and fabrication of HOE for clock distribution. The set-up consists of a HOE imaging a source (semiconductor laser) onto multiple photodetectors in an integrated circuit. They have studied and fabricated a multi-focus doublet HOE. The aberrations due to the wavelength shift between recording ( lambda -488 nm) and reconstruction ( lambda =780 nm) have been minimized by an appropriate recording and readout geometry. The diffraction efficiency has been optimized by a copying technique.<
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