A 3-D Low Jitter and Skew Clock Distribution Network Scheme Using LTCC Package Level Interposer With a Planar Cavity Resonator

In this paper, we propose a new three-dimensional (3-D) clock distribution network (CDN) scheme using a low temperature co-fired ceramic (LTCC) package level interposer with a planar cavity resonator to achieve extremely low jitter and skew clock delivery even in severe power supply noise environments, especially for digital chips in 3-D stacked chip packages. It is based on a uniform-phase of the standing wave at the quarter-wavelength planar cavity resonator embedded inside the LTCC interposer. Substantial suppression of the timing jitter and skew was successfully demonstrated through a series of design, fabrication, and measurement processes of test devices and packages.