Capacitive transducer for relative position error galvo mirrors

A transducer was designed to sense small angular displacements of servo-controlled galvo mirrors in rotary optical storage devices. The transducer is differential in nature, and operates on the principle of linear electrical capacitance variation with area overlap of uniquely shaped capacitor plates. These capacitive plates lie in planes normal to the axis of rotation, and consist of many electrically connected wedge-shaped projections aligned radially to the center of rotation. A prototype was fabricated and tested. For optical storage devices, experimentally determined characteristic curves show sufficient linearity and repeatability for relative position error (RPE) feedback applications, at plate spacings of 0.15 mm or less. A design change, for further extending the linear range of the characteristic curve of the transducer beyond RPE feedback requirements, is described. A circuit design to produce voltage variations proportional to differential capacitance changes in the transducer is discussed, and peak-to-peak signal-to-noise ratio is conservatively approximated at 2/spl times/10/sup 4/ with 10 kHz bandwidth.