A Latchable Phase-Change Microvalve With Integrated Heaters

This paper presents a latchable phase-change microvalve with integrated microheaters, which is suitable for lab-on-a-chip systems where minimal energy consumption is desired. The microvalve exploits low-melting-point paraffin wax, whose solid-liquid phase changes allow switching of fluid flow through deformable microchannel ceiling. Switching is initiated by melting of paraffin through an integrated microheater, with an additional pneumatic pressure used for the open-to-close switching. The valve consumes energy only during initiation of valve switching. When paraffin solidifies, the switched state is maintained passively. The microvalve was fabricated from polydimethylsiloxane through multilayer soft lithography techniques. Experiments show that the valve can switch flow within 4-8 s due to the small thermal mass and localized melting of paraffin wax; when closed, the valve can passively withstand an inlet pressure over 50 kPa without leakage. Time response of the valve can be further improved with improved heater and wax chamber designs, while the latching ability can be improved by optimizing the wax chamber/membrane design. Compared to existing latchable phase-change valves, the microvalve has no risk of cross-contamination. In addition, the improved sealing offered by the compliant membrane makes the valve robust and flexible in operation, allowing large ranges of initiation pressure from various actuation schemes.