CCD wafer scale integration

Wafer scale CCD photodetector arrays of 26 million pixels or more are being fabricated on a limited production basis today. This paper provides an introduction to CCD wafer scale integration with an emphasis on common wafer scale CCD design architectures, applications and fabrication processes. Examples of wafer scale CCD products are reviewed, and a triple poly, double metal wafer scale CCD fabrication process is discussed in comparison with typical digital CMOS processes. Very large area CCD photodetector arrays designed and fabricated by Orbit Semiconductor are discussed in some detail. These include an 8 million pixel 3 cm by 6 cm wafer scale CCD imager for digital photography and a family of CCD sensors for intraoral digital dental radiography. Finally, future possibilities in wafer scale CCD's are discussed.