Self-holding optical waveguide switch controlled by micromechanisms

We propose an n/spl times/n optical switch that is suitable for flexible and reliable optical access networks and for reconfigurable optical inter-module connections in large-scale processing systems. The switch consists of an intersecting waveguide matrix, matching oil, and microactuators. Switching is based on the movement of oil due to capillary pressure, which is controlled by the microactuator. The necessary switching conditions were calculated and the results showed that both the oil volume and the microactuator position must be controlled. A trial optical switch was fabricated to test the switching principle, and switching and self-holding were both confirmed. These results show the feasibility of a very small self-holding n/spl times/n optical switch that uses a waveguide matrix and microactuators made by using microfabrication technologies.