Polarization-analyzing CMOS image sensor using monolithically embedded polarizer for microchemistry systems

A polarization-analyzing CMOS image sensor was designed. The sensor was designed with target applications of intelligent microchemistry system. Embedded wire grid polarizer with various angles was configured on the photodiodes. The performances of the sensor were characterized and it was demonstrated that the sensor can be used for polarization measurement with an accuracy of 0.04 deg. A polarimetric measurement of chiral solution was also successfully demonstrated.