Linearized Gimbal-less Two-Axis MEMS Mirrors

Gimbal-less two-axis scanning MEMS mirrors provide ultra low-power and fast optical beam scanning at angles of up to 32deg in both axes, while dissipating less than 1 mW of power. Linearized driving scheme and 4-quadrant addressable electrostatic comb drive design gives nearly linear voltage-angle characteristics. Devices are made entirely of single-crystal silicon, resulting in excellent repeatability and reliability. Mirrors from 1 mm to 4 mm allow users to optimize in their application.