Active substrate membrane probe card

A monolithic active membrane probe card capable of wafer-level probing of high speed integrated circuits is presented. The key feature of this probe card is the integration of test circuitry in close proximity to the probe tips. The fabrication of the probe card involves the incorporation of a polyimide membrane and tungsten probe tips on a BiCMOS wafer. A measurement comparison with needle probes demonstrates an enhanced capability for at-speed probing of circuits at the wafer-level.