Statistical IC process and product simulation using STADIUM

The software program called STADIUM has been developed by researchers at Florida Institute of Technology (Florida Tech) through funding from SEMATECH. The purpose of STADIUM is to facilitate the statistical design and simulation of integrated circuit processes, devices and products. It is a software shell which uses existing simulators in a design of experiments statistical methodology and allows the estimation of the statistical response of the manufacturing environment. This paper presents some of the methodology and implementation details of STADIUM.