Tube type micro manipulator using shape memory alloy (SMA)

A five degrees of freedom tube type micro manipulator has been successfully developed. The manipulator is 1 mm in diameter and 80 mm in length. The SMA (shape memory alloy) plate is applied as an actuator. For integration of electrical components of this manipulator, MIF (multifunction integrated film) has been developed. The MIF is flexible film, which includes heaters, sensors, lead wires and electrodes. This manipulator was controlled with position feedback loop, using the sensor's information.