Monolithic capillary gel electrophoresis stage with on-chip detector

This paper describes the fabrication and initial measurements of an electrophoresis stage integrated with a substrate detector. The device is fabricated on a single silicon substrate using a 10-mask process. The separation channels are constructed with a polysilicon layer deposited on the surface of a substrate containing a buried, highly sensitive diffusion radiation detector. The buried detector can resolve single beta decay events from /sup 33/P- and /sup 32/P-labeled DNA. Initial experiments show migration of radioactive species in the channel at gel fields of 27 V cm/sup -1/.