Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio

This paper describes a new way to design and fabricate compliant micromechanisms and material structures with negative Poisson's ratio (NPR). The design of compliant mechanisms and material structures is accomplished in an automated way using a numerical topology optimization method. The procedure allows the user to specify the elastic properties of materials or the mechanical or geometrical advantages of compliant mechanisms and returns the optimal structures. The topologies obtained by the numerical procedure require practically no interaction by the engineer before they can be transferred to the fabrication unit. Fabrication is carried out by patterning a sputtered silicon on a PECVD-glass with a laser micromachining set-up. Subsequently the structures are etched into the underlying PECVD-glass and the glass are underetched, all in one two-step RIE process. The components are tested using a probe placed on an xy-stage. This fast prototyping allows newly developed topologies to be fabricated and tested within the same day.