1.5 /spl mu/m analog BiCMOS/DMOS process for medium voltage and current power ICs applications up to 50 V

ABCD150 is a 1.5 /spl mu/m analog BiCMOS/DMOS process. It addresses power ICs for medium voltage and current applications up to 50 V. Four types of power MOS transistors are available; low voltage MOS; high voltage MOS; vertical DMOS; and HV lateral DMOS. Each is optimized for minimum specific on resistance R/sub ds/(on) (in /spl Omega/.mm/sup 2/) at their respective operating voltages.