MEMS three-axis accelerometer: Design, fabrication and application of measuring heart wall motion

This paper presents the design, simulation and fabrication of a SOI micromachined three-axis accelerometer. The sensor is to be implanted inside the body of a patient who has just undergone coronary artery bypass surgery. Sutured in place to the outer wall of the heart, the sensor is to detect post-surgical risks such as regional cardiac ischemia. Feasibility studies of using this type of sensor on animals have proven this monitoring technology using large commercially available sensors. This project is to design and fabricate a three-axis accelerometer that better meets the size requirements. Sensing of acceleration is made possible using the piezoresistive effect.