Monochromatic imaging of scattered laser light from in situ generated particles in plasmas

Spatially resolved images of particle distributions are measured in steady-state plasmas in a GEC (gaseous electronics conference) plasma reactor. Images are obtained by monochromatic imaging of scattered laser light using a microchannel plate (MCP) image intensifier and a high-speed video camera. The observed distributions of particulates generated by adding small quantities of CHF/sub 3/ to an argon plasma are extremely complex and diverse. The patterns observed are temporally varying, and rarely as simple as domes and rings observed in other reactors. The forces acting on the particles are sufficiently complex that reproducing specific spatial patterns by controlling processing parameters is often impossible.