Monolithic integration of waveguide polymer electrooptic modulators on VLSI circuitry

We demonstrated some of the critical technology that is needed for the monolithic integration of polymer electrooptic modulators and VLSI circuitry by fabricating and testing a phase slab modulator on nonplanar VLSI circuits. We demonstrated the survival of GaAs MESFET's to the high-voltage poling and polymer modulator fabrication procedures. We also implemented an electrical interconnect scheme between the electronics and photonics layers.