Study and preparation of high-T/sub c/ superconducting (HTSC) thin films for electronic applications

The authors review the preparation, processing, and properties of the coevaporated Y-Ba-Cu-O thin films. In addition, they cover the fabrication of submicrometer wires and laser micromodification of these films. High-quality superconducting YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films were reproducibly prepared through thermal coevaporation of BaF/sub 2/, Y, and Cu. Uniformity in thickness and composition of the deposited films can be achieved for a 2.5-in.-diameter area. Highly c-oriented films with a total transition temperature above 90 K were reproducibly made on