Air Pressure Sensor for an Insect Wing

This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250 mum times 200 mum times 0.3 mum. The sensitivity to air pressure was 0.29 times 10
^-3
Pa
^-1
below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured when the flow was both steady and unsteady.