EHD Micro Pump using Pyrolyzed Polymer 3-D Carbon Mesh Electrodes

This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures. Low temperature SU-8 bonding method under 90degC was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23 Pa and 400 nL/min under applied voltage of 500 V.