A new method to determine the MOSFET effective channel width

A method of determining the effective channel width of a MOSFET device that is simple and accurate is discussed. While simple, this method takes the width-dependent series resistance of MOSFETs into account, which has not been done in previous methods. The results correlate well with SEM cross section measurements. In addition, the method is applicable to current scaled MOSFETs, requiring no measurements outside the normal operating range of the devices being characterized.<
>