Active-Matrix Microelectrode Arrays Integrated With Vertically Aligned Carbon Nanofibers

In this letter, we have successfully integrated vertically aligned carbon nanofibers (VACNFs) onto active matrix thin-film transistor (TFT) and demonstrate a new microelectrode array (MEA) platform. The materials and processes of the bottom gate inverted staggered TFT structure were designed to be compatible with the requisite high-temperature $(\sim\! \hbox{700}\ ^{\circ}\hbox{C})$ and direct current plasma-enhanced chemical vapor deposition VACNF growth process. The critical device integration issues are elaborated, and initial device characteristics are reported. This device platform provides great potential as an advanced MEA for direct cell sensing, probing, and recording with a high electrode density and active addressability.