A TE/sub 011+/spl delta// mode sapphire resonator probe for accurate characterization of microwave surface resistance of HTS thin films

A special TE/sub 011+/spl delta// mode sapphire resonator and an equivalent perfect conductor calibration technique were developed to measure the surface resistance Rs of a single piece of HTS thin film non-destructively at 10 GHz and 77 K. The resonator is formed by a permanent probe and a replaceable test sample. The probe has Q-factor greater than 280000-good sample load repeatability and sensitivity about 20 /spl mu//spl Omega/ for HTS samples under test with dimension equal to or greater than /spl phi/28 mm. The calibration employs a symmetric configuration which presents an equivalent Rs of zero ohm and ensures the accuracy of the measurement. The measured Rs data of YBCO thin films made by laser ablation and magnetic sputtering are less than 250 /spl mu//spl Omega/.<
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