Electrical properties of ultrasonic linear motor using low temperature sintering PZW-PMN-PZT multilayer actuator

In this study, multilayer actuator type ultrasonic linear motor (USLM) was simulated using ATILA for investigating its optimum driving conditions. And also, its velocity properties were investigated according to preload and input voltage. As the simulation results, with the increase of the number of piezoelectric actuator layers, displacement of node was increased. Maximum total displacement of node was about 3.47 μm at the 11 layered ultrasonic motor under 5V. At the ultrasonic linear motor using the 11layer piezoelectric actuator, the maximum velocity of 0.194m/s was obtained under an input voltage of 30V and preload of 5g.