Micromachining and artificial neural networks: the future of smart sensing

A new concept in "smart sensing" is presented utilizing silicon micromachining and artificial neural network (ANN) techniques. The basics of silicon micromachining and multilayer artificial neural networks with supervised training are discussed. An "intelligent" single sensor system and a multiple sensor system are discussed using a pressure sensing requirement as an example. These techniques can be adapted to numerous requirements pertaining to the aerospace, defense, commercial and industrial needs in a cost effective manner.<
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