Chosen electrical and stability properties of laser-shaped thick-film and LTCC inductors

This paper presents fabrication as well as chosen electrical and stability properties of laser-shaped thick-film (made on alumina) and LTCC (with DP 951 ceramic tape as a substrate) inductors. Such components are made based on silver or palladium-silver inks with 14–16 ∼m thickness. Inductance, resistance and quality factor, Q
L
are determined in a wide frequency (10 kHz – 110 MHz) and temperature (20°C – 250°C) range and are analyzed as a function of inductor geometry (shape and width of conductive tracks) and metallurgy of conductive layer. The stability properties, i.e. fractional inductance and resistance changes after long-term thermal ageing at elevated temperature (150°C and/or 250°C, 250 hours each) are also investigated and analyzed.