Hybrid integrated CMOS-microfluidic device for the detection and characterization of particles

A hybrid integrated CMOS/Microfluidic system has been developed for cytometric applications. The active area of the CMOS sensor consists of two linear arrays of Active Pixel Sensor (APS). Near-field coupling of the CMOS sensor to the microfluidic system is achieved using a flip chip solder-reflow technique. The experimental results show that the system can be readily used for the detection and size-measurement of microsphere particles.