Technique of XeCl-excilamps computer modeling

The procedure of electric-discharge XeCl-excilamps modeling is presented. There are many reports on the different models of XeCl-excilamps, but for practical applications and theoretical analysis having clear physical sense it is useful to consider a general procedure. In general case program of XeCl-excilamps modeling includes the next subprograms: the subprogram for solution of Boltzmann equation for electrons; subprogram for calculation of solving of set of equations for kinetic processes; subprogram for calculation of solving of set of equations for electric circuit of excitation system; data base for cross-section of reaction with electron participation; data base for rate coefficients of reactions with heavy particles, ions and photons participation. The model must be able to calculate an electrons concentration, density of excimer XeCl* molecules and specific energy deposition in active medium. The knowledge of XeCl* molecules concentration has allowed to evaluate the excilamp output power.