Design and fabrication of SOI-based micromirror for laser raster scanning display

The relationship between length of torsional beam and resonant frequency is showed as fig 3. The resonant frequency was measured in range of 22.6–23.8 kHz according to the torsioanal beam length. The width of the torsioanal beam is 100μm and thickness of beam is 85μm. With simulation of FEM we acquired the optical scanning angle of 15° when driven by the 65–75V sinusoidal control voltage of the resonant frequency at 23KHz with the 100Vdc bias voltages. The detailed relationship between optical scanning angle and amplitude of sinusoidal driving voltage is shown as fig 4.