Pressure-sensitive cuts for surface acoustic waves in /spl alpha/-quartz

The influence of external static forces on SAW velocity is computed for the case of circular plates (membranes). The pressure sensitivity of the SAW velocity as a function of /spl alpha/-quartz crystal anisotropy is presented by sensitivity contour mapping for two independent variables: direction of SAW propagation and cut angles of the /spl alpha/-quartz substrate. The theoretical sensitivity values are compared with experimental results for the case of circular plates. Both experimental and theoretical results are in good agreement.<
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