Piezoelectric aluminum nitride resonator for reference oscillator

This paper investigates in plane extensional piezoelectric resonator operating at MHz frequency. Thin Film Elongation Acoustic Resonator (TFEAR) consists of piezoelectric aluminum nitride thin film sandwiched between two aluminum electrodes. Resonators have been manufactured on silicon wafers; AlN and Al thin films have been deposited using standard DC magnetron sputtering technology. Resonance frequencies between 2 and 80 MHz have been measured for 10 – 50 μm width and 50 – 1000 μm length resonators. Q factor up to 3000 has been measured in air and thermal measurement has been done for some TFEAR.